Patent Assignment
Reel/Frame 044271/0561
Assignment of Assignor's Interest
Recorded: 2017-12-01
Pages: 3
Assignor
KIYOHARA, YASUO
Executed: 2017-11-21
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Supercritical Fluid Producing Apparatus and Substrate Processing Apparatus