Patent Assignment
Reel/Frame 044300/0484
Assignment of Assignor's Interest
Recorded: 2017-12-05
Pages: 3
Assignors
TSENG, CHUN-HAO
Executed: 2015-10-29
CHIN, SHENG-CHI
Executed: 2015-10-29
CHU, YUAN-CHIH
Executed: 2015-10-29
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method to Fabricate Mask-Pellicle System