Patent Assignment
Reel/Frame 044327/0776
Assignment of Assignor's Interest
Recorded: 2017-12-07
Pages: 5
Assignee
NUFLARE TECHNOLOGY, INC.
8-1, SHINSUGITA-CHO, ISOGO-KU, YOKOHAMA-SHI, KANAGAWA, JAPAN
Covered Property
(1)
Position Correction Method of Stage Mechanism and Charged Particle Beam Lithography Apparatus