Patent Assignment
Reel/Frame 044329/0238
Assignment of Assignor's Interest
Recorded: 2017-12-07
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method and Plasma Processing Apparatus