Patent Assignment
Reel/Frame 044343/0859
Assignment of Assignor's Interest
Recorded: 2017-12-08
Pages: 3
Assignors
YI, CHANG FU
Executed: 2016-08-05
CHIU, YIH-SONG
Executed: 2017-08-17
KU, SHAO-YEN
Executed: 2016-08-12
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method for an Etch Process with Silicon Concentration Control