Patent Assignment
Reel/Frame 044391/0602
Assignment of Assignor's Interest
Recorded: 2017-12-13
Pages: 6
Assignors
GELLINEAU, ANTONIO
Executed: 2017-11-08
HENCH, JOHN
Executed: 2017-11-30
DI REGOLO, JOSEPH A.
Executed: 2017-11-21
ARTEMIEV, NIKOLAY
Executed: 2017-11-10
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology System