Patent Assignment
Reel/Frame 044398/0735
Assignment of Assignor's Interest
Recorded: 2017-12-14
Pages: 2
Assignor
OTSUJI, MASAYUKI
Executed: 2017-11-05
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus