Patent Assignment
Reel/Frame 044401/0539
Assignment of Assignor's Interest
Recorded: 2017-12-14
Pages: 6
Assignors
TAKEZAWA, YOSHIHIRO
Executed: 2017-11-29
SAKASHITA, KUNIYASU
Executed: 2017-12-06
NAKAJIMA, SHIGERU
Executed: 2017-12-04
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film Forming Apparatus and Film Forming Method