Patent Assignment
Reel/Frame 044403/0458
Assignment of Assignor's Interest
Recorded: 2017-12-14
Pages: 6
Assignors
CHEN, BOXUE
Executed: 2017-10-19
KUZNETSOV, ALEXANDER
Executed: 2017-10-20
SHCHEGROV, ANDREI V.
Executed: 2017-12-14
VELDMAN, ANDREI
Executed: 2017-10-19
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Hybrid Metrology for Patterned Wafer Characterization