Patent Assignment
Reel/Frame 044430/0682
Assignment of Assignor's Interest
Recorded: 2017-12-19
Pages: 4
Assignors
TANAKA, YUJI
Executed: 2017-12-05
ASAI, MASAYA
Executed: 2017-12-12
HARUMOTO, MASAHIKO
Executed: 2017-11-29
KANEYAMA, KOJI
Executed: 2017-12-12
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method