Patent Assignment
Reel/Frame 044437/0016
Assignment of Assignor's Interest
Recorded: 2017-12-19
Pages: 6
Assignors
DE SILVA, EKMINI ANUJA
Executed: 2017-12-18
GOLDFARB, DARIO
Executed: 2017-12-18
FELIX, NELSON
Executed: 2017-12-18
CORLISS, DANIEL
Executed: 2017-12-18
WOJTECKI, RUDY J.
Executed: 2017-12-18
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Patterning Material Film Stack with Metal-Containing Top Coat for Enhanced Sensitivity in Extreme Ultraviolet (Euv) Lithography