Patent Assignment
Reel/Frame 044442/0686
Assignment of Assignor's Interest
Recorded: 2017-11-14
Pages: 8
Assignors
GOSHI, GENTARO
Executed: 2017-11-02
EGASHIRA, KEISUKE
Executed: 2017-11-01
KAWABUCHI, YOSUKE
Executed: 2017-11-02
KIYOSE, HIROMI
Executed: 2017-11-02
MASUZUMI, TAKURO
Executed: 2017-11-02
OHNO, HIROKI
Executed: 2017-11-02
TSUKANO, KENTO
Executed: 2017-11-02
MARUMOTO, HIROSHI
Executed: 2017-11-01
KITAYAMA, SHOTARO
Executed: 2017-11-02
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Recording Medium