Patent Assignment
Reel/Frame 044448/0499
Assignment of Assignor's Interest
Recorded: 2017-12-20
Pages: 8
Assignors
XU, YONGAN
Executed: 2017-12-19
GUO, JING
Executed: 2017-12-18
DE SILVA, EKMINI A.
Executed: 2017-12-18
GLUSCHENKOV, OLEG
Executed: 2017-12-19
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Tunable Adhesion of Euv Photoresist on Oxide Surface