Patent Assignment
Reel/Frame 044473/0231
Assignment of Assignor's Interest
Recorded: 2017-12-22
Pages: 10
Assignors
CHIU, WEI-CHAO
Executed: 2017-09-27
WANG, CHIH-CHIEN
Executed: 2017-09-27
SHIU, FENG-JIA
Executed: 2017-09-27
KUO, CHING-SEN
Executed: 2017-09-27
CHANG, CHUN-WEI
Executed: 2017-09-27
TZENG, KAI
Executed: 2017-09-27
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, TAIWAN
Covered Property
(1)
Method of High-Aspect Ratio Pattern Formation with Submicron Pixel Pitch
Patent:
10,121,811 →
Application:
15/686,916 →