Patent Assignment
Reel/Frame 044486/0057
Assignment of Assignor's Interest
Recorded: 2017-12-26
Pages: 5
Assignor
TAKEDA, TSUYOSHI
Executed: 2017-12-11
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.