Patent Assignment
Reel/Frame 044489/0731
Assignment of Assignor's Interest
Recorded: 2017-12-27
Pages: 5
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Method and System for Generating Programmed Defects for Use in Metrology Measurements