Patent Assignment
Reel/Frame 044531/0605
Assignment of Assignor's Interest
Recorded: 2018-01-04
Pages: 3
Assignors
TINNEMANS, PATRICIUS ALOYSIUS JACOBUS
Executed: 2012-11-19
DEN BOEF, ARIE JEFFREY
Executed: 2012-11-19
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2012-11-19
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Method and Apparatus for Measuring Asymmetry of a Microstructure, Position Measuring Method, Position Measuring Apparatus, Lithographic Apparatus and Device Manufacturing Method