Patent Assignment
Reel/Frame 044547/0318
Assignment of Assignor's Interest
Recorded: 2017-11-29
Pages: 11
Assignors
KITAYAMA, SHOTARO
Executed: 2017-11-21
GOSHI, GENTARO
Executed: 2017-11-22
OHNO, HIROKI
Executed: 2017-11-28
EGASHIRA, KEISUKE
Executed: 2017-11-21
KAWABUCHI, YOSUKE
Executed: 2017-11-23
MARUMOTO, HIROSHI
Executed: 2017-11-21
MASUZUMI, TAKURO
Executed: 2017-11-21
TSUKANO, KENTO
Executed: 2017-11-22
KIYOSE, HIROMI
Executed: 2017-11-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Method of Cleaning Substrate Processing Apparatus and System of Cleaning Substrate Processing Apparatus