Patent Assignment
Reel/Frame 044547/0567
Assignment of Assignor's Interest
Recorded: 2018-01-05
Pages: 7
Assignors
SJMAENOK, LEONID AIZIKOVITCH
Executed: 2008-12-11
BANINE, VADIM YEVGENYEVICH
Executed: 2008-09-08
MOORS, JOHANNES HUBERTUS JOSEPHINA
Executed: 2009-04-03
GLUSHKOV, DENIS
Executed: 2008-09-17
YAKUNIN, ANDREI MIKHAILOVICH
Executed: 2008-09-17
Assignee
ASML NETHERLANDS B.V.
DE RUN 6501, VELDHOVEN, NL-5504 DR, NETHERLANDS
Covered Property
(1)
Optical Element Comprising Oriented Carbon Nanotube Sheet and Lithographic Apparatus Comprising Such Optical Element