Patent Assignment
Reel/Frame 044589/0500
Assignment of Assignor's Interest
Recorded: 2018-01-10
Pages: 4
Assignors
PANDEV, STILIAN IVANOV
Executed: 2018-01-04
LU, WEI
Executed: 2018-01-04
SHCHEGROV, ANDREI V.
Executed: 2018-01-10
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Process Robust Overlay Metrology Based On Optical Scatterometry