Patent Assignment
Reel/Frame 044641/0096
Assignment of Assignor's Interest
Recorded: 2018-01-17
Pages: 6
Assignors
CHENG, KANGGUO
Executed: 2017-04-11
LIU, ZUOGUANG
Executed: 2017-04-12
NACZAS, SEBASTIAN
Executed: 2017-04-11
WU, HENG
Executed: 2017-04-11
XU, PENG
Executed: 2017-04-12
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Fabrication of Vertical Transport Fin Field Effect Transistors with a Self-Aligned Separator and an Isolation Region with an Air Gap