Patent Assignment
Reel/Frame 044657/0970
Assignment of Assignor's Interest
Recorded: 2018-01-18
Pages: 3
Assignors
XIAO, MANCHAO
Executed: 2018-01-15
SPENCE, DANIEL P
Executed: 2018-01-15
HO, RICHARD
Executed: 2018-01-15
Assignee
VERSUM MATERIALS US, LLC
8555 SOUTH RIVER PARKWAY, PATENT DEPT., TEMPE, ARIZONA, 85284
Covered Property
(1)
Precursors and Flowable CVD Methods for Making Low-K Films to Fill Surface Features