Patent Assignment
Reel/Frame 044661/0563
Assignment of Assignor's Interest
Recorded: 2018-01-19
Pages: 4
Assignors
OSADA, NAOYUKI
Executed: 2018-01-15
YAMAGUCHI, TAKAHIRO
Executed: 2018-01-10
FUJITA, ERI
Executed: 2018-01-10
IWASAKI, AKIHISA
Executed: 2018-01-10
HIGUCHI, AYUMI
Executed: 2018-01-10
IWAHATA, SHOTA
Executed: 2018-01-10
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method