Patent Assignment
Reel/Frame 044686/0273
Assignment of Assignor's Interest
Recorded: 2018-01-22
Pages: 8
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method Including Cleaning of Inside of Chamber Main Body of Plasma Processing Apparatus