Patent Assignment
Reel/Frame 044688/0827
Assignment of Assignor's Interest
Recorded: 2018-01-22
Pages: 4
Assignors
KIM, YUNSANG
Executed: 2018-01-17
KWON, HYUK-JUN
Executed: 2018-01-19
PAENG, DONG WOO
Executed: 2018-01-17
ZHANG, HE
Executed: 2018-01-17
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Isotropic Etching of Film with Atomic Layer Control