Patent Assignment
Reel/Frame 044711/0619
Assignment of Assignor's Interest
Recorded: 2018-01-24
Pages: 3
Assignor
OKA, SHINSUKE
Executed: 2018-01-22
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Temperature Control Method, and Temperature Control Program