Patent Assignment
Reel/Frame 044725/0458
Assignment of Assignor's Interest
Recorded: 2018-01-25
Pages: 3
Assignors
KIKAI, TAKAYA
Executed: 2018-01-24
YOSHIDA, YUICHI
Executed: 2018-01-24
OHISHI, YUZO
Executed: 2018-01-24
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium