Patent Assignment
Reel/Frame 044738/0849
Assignment of Assignor's Interest
Recorded: 2018-01-26
Pages: 3
Assignors
KAGAWA, KOJI
Executed: 2018-01-04
YONEZAWA, SYUHEI
Executed: 2018-01-09
DOBASHI, KAZUYA
Executed: 2018-01-09
TAKASHIMA, TOSHIHIDE
Executed: 2018-01-15
AMAI, MASARU
Executed: 2018-01-16
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method and Apparatus for Substrate Processing