Patent Assignment
Reel/Frame 044739/0658
Assignment of Assignor's Interest
Recorded: 2018-01-26
Pages: 8
Assignors
OGAWA, SHUHEI
Executed: 2018-01-09
PARK, WANJAE
Executed: 2018-01-05
KIHARA, YOSHIHIDE
Executed: 2018-01-09
HONDA, MASANOBU
Executed: 2018-01-09
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Method