Patent Assignment
Reel/Frame 044783/0543
Assignment of Assignor's Interest
Recorded: 2018-01-31
Pages: 6
Assignors
CHANG, CHUN-LIN LOUIS
Executed: 2017-12-08
CHIEN, SHANG-CHIEH
Executed: 2017-12-08
WU, SHANG-YING
Executed: 2017-12-08
CHENG, LI-KAI
Executed: 2017-12-14
FU, TZUNG-CHI
Executed: 2017-12-08
LIU, BO-TSUN
Executed: 2017-12-08
CHEN, LI-JUI
Executed: 2017-12-08
CHENG, PO-CHUNG
Executed: 2017-12-12
YEN, ANTHONY
Executed: 2017-12-08
CHEN, CHIA-CHEN
Executed: 2017-12-08
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
8, LI-HSIN RD. 6, HSINCHU SCIENCE PARK, HSINCHU, 300-78, TAIWAN
Covered Property
(1)
Euv Vessel Inspection Method and Related System