Patent Assignment
Reel/Frame 044786/0281
Assignment of Assignor's Interest
Recorded: 2018-01-31
Pages: 5
Assignor
IWAO, TOSHIHIKO
Executed: 2018-01-11
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Microwave Plasma Source, Microwave Plasma Processing Apparatus and Plasma Processing Method