Patent Assignment
Reel/Frame 044835/0933
Assignment of Assignor's Interest
Recorded: 2018-02-05
Pages: 5
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Heat Exchanger for Regulating Surface Temperature of a Polishing Pad, Polishing Apparatus, Polishing Method, and Medium Storing Computer Program