Patent Assignment
Reel/Frame 044881/0845
Assignment of Assignor's Interest
Recorded: 2018-02-09
Pages: 6
Assignors
KAMIMURA, DAIGI
Executed: 2018-01-05
ITO, TAKESHI
Executed: 2018-01-06
TANIYAMA, TOMOSHI
Executed: 2018-01-09
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.