Patent Assignment
Reel/Frame 044939/0444
Assignment of Assignor's Interest
Recorded: 2018-02-15
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Vacuum Processing Apparatus and Maintenance Apparatus