Patent Assignment
Reel/Frame 044972/0075
Assignment of Assignor's Interest
Recorded: 2018-02-20
Pages: 6
Assignors
MIEHER, WALTER D.
Executed: 2017-09-07
ABDULHALIM, IBRAHIM
Executed: 2018-02-13
ADEL, MICHAEL
Executed: 2017-09-23
LEVY, ADY
Executed: 2017-11-01
FRIEDMANN, MICHAEL
Executed: 2017-09-22
Assignee
KLA-TENCOR CORPORATION
ONE TECHNOLOGY DRIVE, MILPITAS, CALIFORNIA, 95035
Covered Property
(1)
Apparatus and Methods for Detecting Overlay Errors Using Scatterometry