Patent Assignment
Reel/Frame 044994/0779
Assignment of Assignor's Interest
Recorded: 2018-02-21
Pages: 3
Assignors
SMITH, DAVID
Executed: 2018-02-21
LILL, THORSTEN
Executed: 2017-12-21
FISCHER, ANDREAS
Executed: 2017-12-20
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Atomic Layer Etching Methods and Apparatus