Patent Assignment
Reel/Frame 045005/0186
Assignment of Assignor's Interest
Recorded: 2018-02-22
Pages: 6
Assignors
HAYASHI, TOKUTAROU
Executed: 2018-02-13
HARADA, HIROKI
Executed: 2018-02-13
TERAMOTO, AKIHIRO
Executed: 2018-02-13
TOKIMATU, TOORU
Executed: 2018-02-13
ABE, MASAHIRO
Executed: 2018-02-13
ISHIMARU, KAZUTOSHI
Executed: 2018-02-13
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Transfer Device, Substrate Transfer Method and Recording Medium