Patent Assignment
Reel/Frame 045011/0053
Assignment of Assignor's Interest
Recorded: 2018-02-22
Pages: 2
Assignors
HOWALD, ARTHUR M.
Executed: 2018-02-16
VALCORE, JOHN, JR.
Executed: 2018-02-20
POVOLNY, HENRY STEPHEN
Executed: 2018-02-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Feedback Control System for Iterative Etch Process