Patent Assignment
Reel/Frame 045034/0772
Assignment of Assignor's Interest
Recorded: 2018-02-26
Pages: 3
Assignors
YOSHITOMI, WATARU
Executed: 2018-02-20
ONOUE, KOUTAROU
Executed: 2018-02-20
KURANAGA, YASUSHI
Executed: 2018-02-20
TASHIMA, KAZUKI
Executed: 2018-02-20
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO 107-6325, JAPAN
Covered Property
(1)
Workpiece Processing Apparatus Using Workpiece Having Reference Marks, Workpiece Processing Method, and Computer Storage Medium