Patent Assignment
Reel/Frame 045050/0827
Assignment of Assignor's Interest
Recorded: 2018-02-27
Pages: 4
Assignor
NAGAMI, KOICHI
Executed: 2017-10-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Processing Apparatus