Patent Assignment
Reel/Frame 045059/0876
Assignment of Assignor's Interest
Recorded: 2018-02-28
Pages: 4
Assignors
SUZUKI, HIROYUKI
Executed: 2018-02-26
YABUTA, TAKASHI
Executed: 2018-02-26
NONAKA, JUN
Executed: 2018-02-22
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method