Patent Assignment
Reel/Frame 045069/0483
Assignment of Assignor's Interest
Recorded: 2018-02-28
Pages: 6
Assignors
HONG, JUNG-PYO
Executed: 2018-01-11
SUN, JONG-WOO
Executed: 2018-01-11
SUNG, JUNG-MO
Executed: 2018-01-11
Assignee
SAMSUNG ELECTRONICS CO., LTD.
129 SAMSUNG-RO, YEONGTONG-GU, SUWON-SI, GYEONGGI-DO, 16677, KOREA, REPUBLIC OF
Covered Property
(1)
Plasma Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same