Patent Assignment
Reel/Frame 045078/0553
Assignment of Assignor's Interest
Recorded: 2018-03-01
Pages: 6
Assignors
EKINCI, YASIN
Executed: 2018-01-03
RIVKIN, LEONID
Executed: 2018-01-09
WRULICH, ALBIN
Executed: 2018-02-06
STREUN, ANDREAS
Executed: 2018-01-16
Assignee
PAUL SCHERRER INSTITUT
PSI, VILLIGEN, CH-5232, SWITZERLAND
Covered Property
(1)
A Compact Light Source for Metrology Applications in the Euv Range