Patent Assignment
Reel/Frame 045083/0047
Assignment of Assignor's Interest
Recorded: 2018-03-01
Pages: 6
Assignors
ISHII, YU
Executed: 2017-11-30
ITO, KENYA
Executed: 2017-11-30
UCHIYAMA, KEISUKE
Executed: 2017-12-01
NAKANISHI, MASAYUKI
Executed: 2017-11-30
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OHTA-KU, TOKYO, 1448510, JAPAN
Covered Property
(1)
Polishing Method, Polishing Apparatus, and Substrate Processing System