Patent Assignment
Reel/Frame 045112/0886
Assignment of Assignor's Interest
Recorded: 2018-03-06
Pages: 5
Assignors
TANAKA, KOJI
Executed: 2018-02-22
SHIOKAWA, TOSHIYUKI
Executed: 2018-02-22
YAMASHITA, KOJI
Executed: 2018-02-23
MASUTOMI, HIROYUKI
Executed: 2018-02-22
KOSUGI, HITOSHI
Executed: 2018-02-22
INADA, TAKAO
Executed: 2018-03-01
IKEDA, TAKASHI
Executed: 2018-02-22
HIRAYAMA, TSUKASA
Executed: 2018-02-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO-TO, JAPAN
Covered Property
(1)
Substrate Liquid Treatment Apparatus