Patent Assignment
Reel/Frame 045127/0266
Assignment of Assignor's Interest
Recorded: 2018-01-23
Pages: 2
Assignors
SHEN, PENG
Executed: 2017-11-29
URABE, KEIICHIRO
Executed: 2017-11-29
YOKOTA, JIRO
Executed: 2017-12-05
GOSSET, NICOLAS
Executed: 2017-11-22
Assignee
L'AIR LIQUIDE, SOCIÉTÉ ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCÉDÉS GEORGES CLAUDE
75 QUAI D'ORSAY, PARIS, F-75007, FRANCE
Covered Property
(1)
Chemistries for Etching Multi-Stacked Layers