Patent Assignment
Reel/Frame 045194/0725
Assignment of Assignor's Interest
Recorded: 2018-03-13
Pages: 6
Assignors
YOSHIDA, HIDENARI
Executed: 2018-02-20
TANIYAMA, TOMOSHI
Executed: 2018-02-20
NAKADA, TAKAYUKI
Executed: 2018-02-20
Assignee
HITACHI KOKUSAI ELECTRIC INC.
15-12, NISHI-SHIMBASHI 2-CHOME,, MINATO-KU, TOKYO, 105-8039, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, and Method for Manufacturing Semiconductor Device
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.