Patent Assignment
Reel/Frame 045210/0750
Assignment of Assignor's Interest
Recorded: 2018-03-14
Pages: 2
Assignors
LONG, MAOLIN
Executed: 2018-03-09
WANG, YUHOU
Executed: 2018-03-09
WU, YING
Executed: 2018-03-14
PATERSON, ALEX
Executed: 2018-03-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Frequency Tuning for a Matchless Plasma Source