Patent Assignment
Reel/Frame 045236/0699
Assignment of Assignor's Interest
Recorded: 2018-03-15
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Rf Metrology System for a Substrate Processing Apparatus Incorporating Rf Sensors with Corresponding Lock-in Amplifiers