Patent Assignment
Reel/Frame 045238/0421
Assignment of Assignor's Interest
Recorded: 2018-03-15
Pages: 5
Assignors
GOPALAKRISHNAN, SUDHAKAR
Executed: 2018-03-09
REIMER, PETER
Executed: 2018-03-15
HARUFF, JOHN
Executed: 2018-03-12
SMITH, DENNIS
Executed: 2018-03-09
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Mass Flow Controller for Substrate Processing